@article{Zhao2005Structure,
  title={Structure and characterization of a planar normally closed bulk-micromachined piezoelectric valve for fuel cell applications},
  author={Zhao, Hengbing and Stanley, Kevin and Wu, Q. M. Jonathan and Czyzewska, Eva},
  journal={Sensors & Actuators A Physical},
  volume={120},
  number={1},
  pages={134-141},
  year={2005},
}